Terahertz Nanoscanning Spectrometer & 3D Imager (TNS3DI)
A new tool for semiconductor metrology
The Applied Research & Photonics model TNS3DI – Terahertz Nanoscanning Spectrometer and 3-D Imaging system, utilizing its proprietary Dendrimer Dipole Excitation technology to deliver what we have demonstrated is unsurpassed analytical, and imaging capability to enable the revolution in advanced materials and structures. The system has demonstrated the ability to pinpoint and catalyze the deep investigation and understanding scientists and engineers all over the world have been searching for, to solve some of the most challenging problems in advanced materials, semiconductors, and related devices, photonics and optoelectronics including displays, medical, biological and pharmaceutical applications, and atomic/nuclear level investigations. Two models are available: (1) TNS3DI-FC, fiber-coupled beam delivery for the most versatility, X, Y = 200 mm standard, up to 450 mm option. (2) TNS3DI-Fs, free-space beam delivery for small samples, X, Y ≤ 100 mm. The TNS3DI delivers combined capabilities of AFM, SEM, TEM, and Time-domain Spectrometer. It is also a diagnostic tool to be used in for the US Military and government laboratories who rely heavily on semiconductors (microchips) in day-to-day operations.
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